Title:

Silicon TCD for the methane and carbon monoxide detection, Journal of Telecommunications and Information Technology, 2005, nr 1

Creator:

Mróz, Jerzy ; Małachowski, Marcin ; Nikodem, Marek ; Górska, Marianna ; Latecki, Bogdan ; Łysko, Jan M.

Subject and Keywords:

silicon ; detector ; gas mixture

Description:

Analytical model, design principles, technology and test results concerning a thermal conductivity detector (TCD) are presented. Prototype TCD units fabricated using the standard silicon IC VLSI and MEMS techniques are reported. The detectors are integrated with gas separation columns and micro-valve dosing systems. Initial tests were carried out in a gas mixture containing methane, carbon monoxide, oxygen, hydrogen and nitrogen.

Publisher:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Date:

2005, nr 1

Resource Type:

artykuł

Format:

application/pdf

DOI:

10.26636/jtit.2005.1.286

ISSN:

1509-4553

eISSN:

1899-8852

Source:

Journal of Telecommunications and Information Technology

Language:

ang

Rights Management:

Biblioteka Naukowa Instytutu Łączności