Tytuł:

Correlation between electric parameters of carbon layers and their capacity for field emission, Journal of Telecommunications and Information Technology, 2007, nr 3

Autor:

Szmidt, Jan ; Czerwosz, Elżbieta ; Gronau, Ryszard

Temat i słowa kluczowe:

diamond-like carbon (DLC) ; carbon layerse (I-V) ; current-voltage (I-V) ; capacitance-voltage (C-V) ; AFM ; field emission ; RF PCVD

Opis:

The aim of this work is to study a possibility of field electron emission from carbon layers produced by radio frequency plasma chemical vapor deposition (RF PCVD) method. A correlation between electric parameters of the layers and the ability to produce electron emission is also studied through material (AFM) and electrical (C-V, I-V) characterization of the obtained layers. It is demonstrated that the layers deposited with the highest self-bias exhibit the highest capacity for electron emission.

Wydawca:

Instytut Łączności - Państwowy Instytut Badawczy, Warszawa

Data wydania:

2007, nr 3

Typ zasobu:

artykuł

Format:

application/pdf

DOI:

ttps://doi.org/10.26636/jtit.2007.3.826 10.26636/jtit.2007.3.826

ISSN:

1509-4553

eISSN:

1899-8852

Źródło:

Journal of Telecommunications and Information Technology

Język:

ang

Prawa:

Biblioteka Naukowa Instytutu Łączności